製品概要
BARC(Bottom Anti-Reflective Coating) for spin coating is a semiconductor material that can control distortion of PR patterns such as standing waves and notching generated by scattering of exposure sources from the lower surface and reflected light in semiconductor process.
特長
- Mw Control:
- <+/-150
- Residual Metal:
- <3ppb in Solution
- Size:
- 50/100/300L
