Miniature Hexapod Six-DOF Positioning System(7.5kg)
小型ヘクサポッド6軸ポジショナ(7.5kg)
製品概要
Our HexGen® HEX150-140HL provides consistent and reliable six degree-of-freedom (DOF) motion in a compact yet stiff platform. You’ll benefit from ultra-fine positioning resolution, ample payload capacity, high process throughput and more.
特長
- 移動量(X/Y/Z):
- 40/40/16mm
- 分解能:
- 20nm
- 垂直荷重容量:
- 7.5kg
- 水平荷重容量:
- 2kg
- Travel(X/Y/Z):
- 40/40/16mm
- Resolution:
- 20nm
- Vertical Payload Capacity:
- 7.5kg
- Horizontal Payload Capacity:
- 2kg
