Two Axis, Silicon Carbide, Planar Air-Bearing Stage
2軸SiC平面エアベアリングステージ
製品概要
The PlanarHDX is the most advanced commercially available planar air-bearing platform on the market.
特長
- 移動量:
- 750x750mm
- 荷重容量:
- 40kg(Max)
- Travel:
- 750x750mm
- Payload Capacity:
- 40kg(Max)
