- ウェハーサイズ: 150mm(Max)
ウェーハーチャック径: 175mm(Typ)
Wet Oxidation System for VCSEL Fabrication
SUMMARY
VIXEL-320 is a compact stand-alone lateral wet oxidation system intended for the fabrication of Vertical Cavity Surface Emitting Lasers. It is an atmospheric-pressure oxidation system with in-situ monitoring of oxide aperture formation. It accommodates single wafers of up to 150 mm (6″) in diameter.
FEATURES
- Wafer Size: 150mm(Max)
Wafer Chuck Diameter: 175mm(Typ)
