Air Bearing, Linear Motor Stage
Air Bearing, Linear Motor Stage
SUMMARY
The ABL3600 dual-axis, large aperture, open-frame, airbearing stage addresses the unique needs of scanning microscopy and mask and wafer inspection.
FEATURES
- Total Travel:
- 50-150mm
- Resolution:
- 0.001-0.2um
- Travel Speed:
- 200mm/s(Max)
- Horizontal Payload Capacity:
- 5-7kg
