XY Nanopositioning Stage

PART NO.: ANT130XY

CATEGORY

Stage /
Nanopositioning Stage

SUPPLIER

Aerotech

SUMMARY

Our ultra-precise ANT130XY stages deliver superior planar performance with excellent geometric characteristics, thanks to an integrated two-axis design.

FEATURES

Travel：60×60/110×110/160x160mm（指定）
分解能：0.5～5nm(Min)

Travel: 60×60/110×110/160x160mm(Specify)
Resolution: 0.5～5nm(Min)

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