- Travel：60×60/110×110/160x160mm（指定）
分解能：0.5～5nm(Min)
XY Nanopositioning Stage
SUMMARY
Our ultra-precise ANT130XY stages deliver superior planar performance with excellent geometric characteristics, thanks to an integrated two-axis design.
FEATURES
- Travel: 60×60/110×110/160x160mm(Specify)
Resolution: 0.5～5nm(Min)
