Miniature Hexapod Six-DOF Positioning System(7.5kg)
Miniature Hexapod Six-DOF Positioning System(7.5kg)
SUMMARY
Our HexGen® HEX150-140HL provides consistent and reliable six degree-of-freedom (DOF) motion in a compact yet stiff platform. You’ll benefit from ultra-fine positioning resolution, ample payload capacity, high process throughput and more.
FEATURES
- Travel(X/Y/Z):
- 40/40/16mm
- Resolution:
- 20nm
- Vertical Payload Capacity:
- 7.5kg
- Horizontal Payload Capacity:
- 2kg
