- Travel: 100~400(指定)
分解能: 0.1~1.0um(指定)
スピード: 300mm/s(Max)

SUMMARY
The PRO165SL offers a desirable balance of compact form factor and high load-carrying capability, making it ideal to use in medium-and high-performance industrial applications. Combining superior craftsmanship with the highest quality components, PRO165SL stages consistently and reliably deliver best-in-class positioning performance.
FEATURES
- Travel: 100~400(Specify)
Resolution: 0.1~1.0um(Specify)
Speed: 300mm/s(Max)